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《Chinese Physics B》 2017年09期
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Initial growth and microstructure feature of Ag films prepared by very-high-frequency magnetron sputtering

张悦  叶超  王响英  杨培芳  郭佳敏  张苏  
【摘要】:The initial growth and microstructure feature of Ag films formation were investigated, which were prepared by using the very-high-frequency(VHF)(60 MHz) magnetron sputtering. Because of the moderate energy and very low flux density of ions impinging on the substrate, the evolutions of initial growth for Ag films formation were well controlled by varying the sputtering power. It was found that the initial growth of Ag films followed the island(Volmer—Weber, VW) growth mode, but before the island nucleation, the adsorption of Ag nanoparticles and the formation of Ag clusters dominated the growth. Therefore, the whole initial stages of Ag films formation included the adsorption of nanoparticles, the formation of clusters, the nucleation by the nanoparticles and clusters simultaneously, the islands formation, and the coalescence of islands.
【作者单位】College
【关键词】Ag film initial growth very-high-frequency sputtering
【基金】:Project supported by the National Natural Science Foundation of China(Grant Nos.11675118 and 11275136)
【分类号】:O484;TB383.1
【正文快照】:
1.Introductionand island coalescence.[14]However,these works focused onRecently,the Ag thin films and nanostructures have beenthe island growth and coalescence,and little information onpaid more attention because of their unique optical and electri-the n

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